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Jaroslav Dzuba
at Institute of Electrical Engineering SAS
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Publications (3)
Proceedings Article | 21 May 2015 Paper
Finite element analysis of AlGaN/GaN micro-diaphragms with diamond coating
J. Dzuba, G. Vanko, M. Vojs, I. Rýger, T. Ižák, V. Jirásek, V. Kutiš, T. Lalinský
Proceedings Volume 9517, 95171I (2015) https://doi.org/10.1117/12.2179126
KEYWORDS: Diamond, Sensors, Coating, Finite element methods, Gallium nitride, Microelectromechanical systems, Silicon, Temperature metrology, Thermal effects, Field effect transistors
Proceedings Article | 21 May 2015 Paper
Laser ablation for membrane processing of AlGaN/GaN- and micro structured ferroelectric thin film MEMS and SiC pressure sensors for extreme conditions
J. Zehetner, G. Vanko, J. Dzuba, I. Ryger, T. Lalinsky, Manuel Benkler, Michal Lucki
Proceedings Volume 9517, 951721 (2015) https://doi.org/10.1117/12.2179041
KEYWORDS: Silicon carbide, Laser ablation, Sensors, Thin films, Sapphire, Microelectromechanical systems, Ceramics, Polarization, Reactive ion etching, Glasses
Proceedings Article | 17 May 2013 Paper
MEMS pressure sensor fabricated by advanced bulk micromachining techniques
Gabriel Vanko, Peter Hudek, Johann Zehetner, Jaroslav Dzuba, Pavlina Choleva, Martin Vallo, Ivan Rýger, Tibor Lalinský
Proceedings Volume 8763, 87632U (2013) https://doi.org/10.1117/12.2017499
KEYWORDS: Silicon carbide, Sensors, Microelectromechanical systems, Heterojunctions, Laser ablation, Bulk micromachining, Silicon, Gallium nitride, Field effect transistors, Etching
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