Dr. Jason H. Lin Profile

Dr. Jason H. Lin

Sr. Engineering Manager at KLA Corp

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Publications (2)

Proceedings Article | 20 April 2011 Paper

Scatterometry measurement for gate ADI and AEI critical dimension of 28-nm metal gate technology

Yu-Hao Huang, Howard Chen, Kyle Shen, H. H. Chen, Chun Chi Yu, J. H. Liao, Xiafang Zhang, Russell Teo, Zhi-Qing Xu, Sungchul Yoo, Ching-Hung Lin, Chao-Yu Cheng, Jason Lin

Proceedings Volume 7971, 79712O (2011) https://doi.org/10.1117/12.879480

KEYWORDS: Semiconducting wafers, Metals, Scatterometry, Single crystal X-ray diffraction, Transmission electron microscopy, Diffractive optical elements, Magnesium, Scatter measurement, Metrology, Critical dimension metrology

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Proceedings Article | 5 November 2005 Paper

Real-world impacts of inverse lithography technology

Jonathan Ho, Yan Wang, Xin Wu, Wolfgang Leitermann, Benjamin Lin, Ming Feng Shieh, Jie-wei Sun, Orson Lin, Jason Lin, Yong Liu, Linyong Pang

Proceedings Volume 5992, 59921Z (2005) https://doi.org/10.1117/12.632211

KEYWORDS: Photomasks, Optical proximity correction, Lithography, Manufacturing, Scanning electron microscopy, Calibration, Image quality, Semiconducting wafers, Semiconductors, Image segmentation

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