Mr. Javier González Pardo Profile

Javier González Pardo

at Wooptix, S.L.

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Author

Publications (2)

Proceedings Article | 8 March 2023 Presentation + Paper

New wafer shape measurement technique for 300mm blank vertically held silicon wafer

Juan Trujillo-Sevilla, Óscar Casanova-González, Alex Roqué-Velasco, Javier González Pardo, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 12428, 124280U (2023) https://doi.org/10.1117/12.2651981

KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Reflection, Data acquisition, Collimation, Camera shutters, Overlay metrology, Gaussian filters, Cameras

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Proceedings Article | 1 December 2022 Presentation + Paper

New wave front phase sensor used for 3D shape measurements of patterned silicon wafers

Juan Trujillo-Sevilla, Óscar Casanova-González, Alex Roqué-Velasco, Miguel Jesús Sicilia, Javier González Pardo, José Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 12292, 122920P (2022) https://doi.org/10.1117/12.2642287

KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Metals, Data acquisition, Image sensors, Reflectivity, Surface finishing, Interferometry, Beam splitters

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