Javier González Pardo
at Wooptix SL
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 8 March 2023 Presentation + Paper
Proceedings Volume 12428, 124280U (2023) https://doi.org/10.1117/12.2651981
KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Reflection, Data acquisition, Collimation, Camera shutters, Overlay metrology, Gaussian filters, Cameras

Proceedings Article | 1 December 2022 Presentation + Paper
Proceedings Volume 12292, 122920P (2022) https://doi.org/10.1117/12.2642287
KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Metals, Data acquisition, Image sensors, Reflectivity, Surface finishing, Interferometry, Beam splitters

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