Dr. Óscar Casanova-González Profile

Dr. Óscar Casanova-González

at Wooptix S L

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 27 April 2023 Poster + Paper

New metrology technique for measuring the free shape of a patterned 300mm wafer held vertically

Juan Trujillo-Sevilla, Óscar Casanova-González, Alex Roqué-Velasco, Miguel Jesús Sicilia, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 12496, 124963G (2023) https://doi.org/10.1117/12.2661903

KEYWORDS: Semiconducting wafers, Silicon, Reflection, Wavefronts, Data acquisition, Cameras, Wafer-level optics, Image sensors, Phase imaging, Metrology

Read Abstract +

Proceedings Article | 8 March 2023 Presentation + Paper

New wafer shape measurement technique for 300mm blank vertically held silicon wafer

Juan Trujillo-Sevilla, Óscar Casanova-González, Alex Roqué-Velasco, Javier González Pardo, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 12428, 124280U (2023) https://doi.org/10.1117/12.2651981

KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Reflection, Data acquisition, Collimation, Camera shutters, Overlay metrology, Gaussian filters, Cameras

Read Abstract +

Proceedings Article | 7 December 2022 Poster + Paper

New wavefront phase sensor used for 3D shape measurements of silicon wafers

Juan Trujillo-Sevilla, Alex Roqué-Velasco, Miguel Jesús Sicilia, Óscar Casanova-González, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 12274, 122741F (2022) https://doi.org/10.1117/12.2645969

KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Cameras, Sensors, Reflectivity, 3D metrology, Wafer-level optics, Phase imaging, Image sensors

Read Abstract +

Proceedings Article | 3 October 2022 Presentation + Paper

Wave front phase imaging for silicon wafer metrology

Juan Trujillo-Sevilla, Alex Roqué-Velasco, Miguel Jesús Sicilia, Óscar Casanova-González, José Manuel Rodríguez-Ramos, Jan Gaudestad

Proceedings Volume 12216, 1221605 (2022) https://doi.org/10.1117/12.2632499

KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Cameras, Reflectivity, Phase imaging, Metrology, Image sensors, Data acquisition, Wafer-level optics

Read Abstract +

Proceedings Article | 5 March 2022 Presentation + Paper

New high repeatability wafer geometry measurement technique for full 200mm and 300mm blank wafers

Juan Trujillo-Sevilla, Álvaro Pérez-García, Óscar Casanova-González, Miriam Velasco-Ocaña, Sabato Ceruso, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Javier Martín-Hernández, Alex Roqué-Velasco, José Manuel Rodríguez-Ramos, Jan Gaudestad

Proceedings Volume 12008, 120080A (2022) https://doi.org/10.1117/12.2607315

KEYWORDS: Semiconducting wafers, Photovoltaics, Silicon, Cameras, Data acquisition, Gaussian filters, Wavefronts, Lithography, Imaging systems

Read Abstract +

Proceedings Article | 28 October 2021 Presentation + Paper

Stria measurement using wave front phase imaging on a transparent plate

Juan M. Trujillo-Sevilla, Oscar Casanova-González, Miriam Velasco-Ocaña, Sabato Ceruso, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Javier Martín-Hernández, Alex Roqué-Velasco, Alvaro Pérez-García, José Manuel Rodríguez-Ramos, Jan Gaudestad

Proceedings Volume 11889, 118891I (2021) https://doi.org/10.1117/12.2605328

KEYWORDS: Wavefronts, Glasses, Phase imaging, Spatial frequencies, Refractive index, Manufacturing, Visualization, Reflectivity, Optical sensors, Light wave propagation

Read Abstract +

Proceedings Article | 12 October 2021 Poster + Presentation + Paper

New metrology technique for measuring wafer geometry on a full 300mm silicon wafer

Juan Trujillo-Sevilla, Óscar Casanova-González, Miriam Velasco-Ocaña, Sabato Ceruso, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Javier Martín-Hernández, Alex Roqué-Velasco, Álvaro Pérez-García, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 11854, 118541B (2021) https://doi.org/10.1117/12.2605516

KEYWORDS: Semiconducting wafers, Silicon, Photovoltaics, Gaussian filters, Data acquisition, Wavefronts, Metrology, Cameras, Overlay metrology, Image sensors

Read Abstract +

Proceedings Article | 19 February 2020 Paper

New high-resolution wave ophthalmic instrument for the characterizing ocular optics

Sergio Bonaque-González, Juan M. Trujillo-Sevilla, Oscar Casanova-González, David Carmona-Ballester, Miguel Sicilia-Cabrera, Sabato Ceruso, Jan Gaudestad, José M. Rodríguez-Ramos

Proceedings Volume 11218, 112181W (2020) https://doi.org/10.1117/12.2548595

KEYWORDS: Sensors, Eye, Wavefront sensors, Image resolution, Wavefronts, Error analysis, Ophthalmology, Distance measurement, Actuators, Diagnostics

Read Abstract +