Dr. Jay Huang Profile

Dr. Jay Huang

Optical System Engineer at KLA Corp

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Publications (1)

Proceedings Article | 21 November 2007 Paper

Bare wafer metrology challenges in microlithography at 45-nm node and beyond

Chunsheng Huang

Proceedings Volume 6827, 682723 (2007) https://doi.org/10.1117/12.759738

KEYWORDS: Semiconducting wafers, Metrology, Optical lithography, Refractive index, Interferometers, Thin films, Critical dimension metrology, Beam splitters, Wafer-level optics, Linear filtering

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