Dr. Ji Young Park Profile

Dr. Ji Young Park

at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 1 May 2023 Presentation + Paper

EUV-induced activation mechanism of photoacid generators: key factors affecting EUV sensitivity

Ji Young Park, Thanh Cuong Nguyen, Deakeon Kim, Hyun-Ji Song, Suk Koo Hong, Won-Joon Son, Hyoshin Ahn, Inkook Jang, Dae Sin Kim

Proceedings Volume 12498, 124980T (2023) https://doi.org/10.1117/12.2652345

KEYWORDS: Photoacid generators, Molecules, Extreme ultraviolet lithography, Extreme ultraviolet, Photoresist materials, Design and modelling, Lithography, Materials properties

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