CONFERENCE PROCEEDINGS
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Dr. Dae Sin Kim
at SAMSUNG Electronics Co Ltd
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Publications (3)
Proceedings Article | 10 April 2024 Presentation + Paper
E-beam simulation for advanced SEM applications in semiconductor industry
Wooyoung Cheon, Taejin Moon, In Kwon, Jinwoo Lee, Jaeyong Lee, Yongjae Kwon, Ashok Ramu, Seonghoon Jin, Tsuji Yukihide, Hyunwoo Chae, Chulwoo Park, Hyunsuk Choi, Kwangseok Lee, Byungseong Ahn, Jaehun Yang, Ami Ma, Qhwan Kim, Donghyeok Im, Jaehyun Bae, Jongcheon Sun, Su-Young Lee, Shinwook Yi, Jiseong Doh, Kyu Baik Chang, Songyi Han, Jaehoon Jeong, Yusin Yang, Dae Sin Kim
Proceedings Volume 12955, 129551J (2024) https://doi.org/10.1117/12.3010074
KEYWORDS: Monte Carlo methods, Scanning electron microscopy, TCAD, Scattering, Inspection, Semiconductors, Computer simulations, Physics, Critical dimension metrology
Proceedings Article | 10 April 2024 Presentation + Paper
A few-shot machine learning-based OCD metrology algorithm with anomaly detection and wafer-level data augmentation
Minkyu Kim, QHwan Kim, Kyu-Baik Chang, Jaehoon Jeong, Sunghee Lee, Seonghui Mo, Dahan Kang, Jinkook Park, Young-Seok Kim, Yongdeok Jeong, Dae Sin Kim
Proceedings Volume 12955, 129550U (2024) https://doi.org/10.1117/12.3009965
KEYWORDS: Machine learning, Data modeling, Semiconducting wafers, Transmission electron microscopy, Metrology, Overfitting, Principal component analysis
Proceedings Article | 1 May 2023 Presentation + Paper
EUV-induced activation mechanism of photoacid generators: key factors affecting EUV sensitivity
Ji Young Park, Thanh Cuong Nguyen, Deakeon Kim, Hyun-Ji Song, Suk Koo Hong, Won-Joon Son, Hyoshin Ahn, Inkook Jang, Dae Sin Kim
Proceedings Volume 12498, 124980T (2023) https://doi.org/10.1117/12.2652345
KEYWORDS: Photoacid generators, Molecules, Extreme ultraviolet lithography, Extreme ultraviolet, Photoresist materials, Design and modelling, Lithography, Materials properties
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