Dr. Jianguo Wen
at Argonne National Lab
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 March 2024 Presentation
Proceedings Volume PC12911, PC129111B (2024) https://doi.org/10.1117/12.3014142
KEYWORDS: Atomic layer deposition, Thin films, Titanium dioxide, Thin film growth, Erbium, Quantum nanophotonics, Quantum enhancement, Doping, Transmission electron microscopy, Surface roughness

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