Mr. Jie Wang Profile

Jie Wang

at Semiconductor Manufacturing International Corp.

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Author

Publications (3)

Proceedings Article | 26 September 2019 Paper

High temperature baking process study in advanced mask cleaning

Dejian Li, Fen Xue, Cong Lu, Wenjun Ling, Xuefei Qin, Jie Wang

Proceedings Volume 11148, 1114816 (2019) https://doi.org/10.1117/12.2536622

KEYWORDS: Photomasks, Ions, Air contamination, Distortion, Mask making, Semiconducting wafers, Image registration, Mask cleaning, Scanning electron microscopy, Image processing

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Proceedings Article | 26 September 2019 Paper

Lithography printability review: an application on advanced photomask production for enhancing mask yield and cycle time

Wenjun Ling, Xuefei Qin, Dejian Li, Fen Xue, Jie Wang, Cong Lu, Mingjing Tian, Ming Chen, Vikram Tolani, Gregg Inderhees, Alexander Tan, Suo Li, Xiaodi Liu

Proceedings Volume 11148, 1114812 (2019) https://doi.org/10.1117/12.2536494

KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Lithography, Mask making, Optical proximity correction, Manufacturing, Defect inspection, Scanners, Computer simulations

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Proceedings Article | 3 October 2018 Paper

Pattern edge roughness study on OMOG mask repair

Xuefei Qin, Jie Wang, Irene Shi, Fen Xue, Alan Li, Wenjun Ling, Linna Cong

Proceedings Volume 10810, 108100Z (2018) https://doi.org/10.1117/12.2501753

KEYWORDS: Plasma, Etching, Edge roughness, Oxides, Photomasks, Oxygen, Distortion, Plasma etching

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