Prof. Jonathan R. Felts Profile

Prof. Jonathan R. Felts

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Publications (1)

Proceedings Article | 26 March 2019 Presentation + Paper

Next generation of heated atomic force microscope cantilever for nanolithography: modelling, simulation, and nanofabrication

Mohammadreza Soleymaniha, Jonathan Felts

Proceedings Volume 10958, 109580Q (2019) https://doi.org/10.1117/12.2514686

KEYWORDS: Silicon, Polymers, Etching, Nanolithography, Atomic force microscopy, Optical lithography, Semiconducting wafers, Nanofabrication, Scanning probe lithography, Atomic force microscopic nanolithography

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