Dr. Julia A. Sakamoto Profile

Dr. Julia A. Sakamoto

Senior Computer Scientist

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Publications (3)

SPIE Journal Paper | 30 March 2016

Lithographic imaging-driven pattern edge placement errors at the 10-nm node

Jacek Tyminski, Julia Sakamoto, Shane Palmer, Stephen Renwick

JM3, Vol. 15, Issue 02, 021402, (March 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.2.021402

KEYWORDS: Scanners, Optical proximity correction, Photomasks, Lithography, Metals, Error analysis, Overlay metrology, Semiconducting wafers, Statistical analysis, Optical lithography

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Proceedings Article | 15 March 2016 Paper

Lithographic imaging-driven pattern edge placement errors at 10nm node

Jacek Tyminski, Stephen Renwick, Shane Palmer, Julia Sakamoto, Steven Slonaker

Proceedings Volume 9780, 97800C (2016) https://doi.org/10.1117/12.2218146

KEYWORDS: Lithography, Optical lithography, Computational lithography, Optical proximity correction, Integrated circuit design, 193nm lithography, Performance modeling, Scanners, Optical design, Optical alignment, Semiconducting wafers, Monte Carlo methods, Image processing, Etching, Ions, Statistical analysis

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Proceedings Article | 2 October 2015 Paper

Large-scale analytical Fourier transform of photomask layouts using graphics processing units

Julia Sakamoto

Proceedings Volume 9630, 963007 (2015) https://doi.org/10.1117/12.2192040

KEYWORDS: Fourier transforms, Photomasks, Graphics processing units, Algorithm development, Lithography, Data processing, Transistors, Ions, Integrated circuits, Semiconducting wafers

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