Mr. Kannan Keizer Profile

Kannan Keizer

at ASML Netherlands B.V.

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Publications (1)

Proceedings Article | 13 June 2022 Presentation

Resist and reticle activities towards High-NA EUV ecosystem readiness

Jara Santaclara, Weimin Gao, Eric Hendrickx, Vincent Wiaux, Joern-Holger Franke, Emily Gallagher, Kannan Keizer, Tatiana Kovalevich, Jo Finders

Proceedings Volume PC12051, PC1205105 (2022) https://doi.org/10.1117/12.2614162

KEYWORDS: Photomasks, Ecosystems, Optical lithography, Extreme ultraviolet, Reticles, Scanners, Metrology, Extreme ultraviolet lithography, Etching, Thin films

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