Mr. Kenneth J. Radigan Profile

Kenneth J. Radigan

Technology Director at LR Consulting

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Publications (2)

Proceedings Article | 1 June 1992 Paper

Evolution of MIMMI: a novel surface imaging resist based on metallic surface imaging of organic photoresists

Kenneth Radigan, Silvia Liddicoat

Proceedings Volume 1672, (1992) https://doi.org/10.1117/12.59739

KEYWORDS: Photoresist materials, Plasmas, Photoresist developing, Semiconducting wafers, Etching, Nickel, Photoresist processing, Oxygen, Metals, Reactive ion etching

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Proceedings Article | 1 June 1992 Paper

Application of a dielectric discontinuity microscope to process development at the Fairchild Research Center of National Semiconductor

Robert Allison, Euisik Yoon, James Heard, Ronald Kovacs, Silvia Liddicoat, Kenneth Radigan

Proceedings Volume 1673, (1992) https://doi.org/10.1117/12.59830

KEYWORDS: Dielectrics, Microscopes, Inspection, Metrology, Visualization, Process control, Phase contrast, Integrated circuits, Metals, Diffraction

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