Ms. Kou Yang Profile

Kou Yang

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Publications (2)

Proceedings Article | 25 March 2019 Paper

Radical sensitive zinc-based nanoparticle EUV photoresists

Kou Yang, Hong Xu, Kazunori Sakai, Vasiliki Kosma, Emmanuel Giannelis, Christopher Ober

Proceedings Volume 10960, 109601R (2019) https://doi.org/10.1117/12.2514982

KEYWORDS: Nanoparticles, Photoresist materials, Extreme ultraviolet lithography, Extreme ultraviolet, Deep ultraviolet, Lithography, Zinc, Optical lithography, Metals, Polymers

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Proceedings Article | 19 March 2018 Paper

EUV metal oxide hybrid photoresists: ultra-small structures for high-resolution patterning

Hong Xu, Kou Yang, Kazunori Sakai, Vasiliki Kosma, Kazuki Kasahara, Emmanuel Giannelis, Christopher Ober

Proceedings Volume 10583, 105831P (2018) https://doi.org/10.1117/12.2297266

KEYWORDS: Nanoparticles, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Optical lithography, Lithography, Metals, Oxides, Zirconium

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