Prof. Le Luo Profile

Prof. Le Luo

at SMIT

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Author

Publications (2)

Proceedings Article | 23 February 2005 Paper

Exploration of a new wafer-level hermetic sealing method by Cu/Sn isothermal solidification technique for MEMS/NEMS devices

Maohua Du, Wei Xu, Le Luo

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.580355

KEYWORDS: Tin, Plasma treatment, Copper, Nitrogen, Solids, Semiconducting wafers, Plasma, Wafer bonding, Indium, Oxides

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Proceedings Article | 7 May 2004 Paper

MEMS SIOB design for integrated transceiver application

Yirong Yang, Yanmin Cai, Yuelin Wang, Jianyi Yang, Yaming Wu, Le Luo, Xiqing Sun

Proceedings Volume 5281, (2004) https://doi.org/10.1117/12.519922

KEYWORDS: Semiconductor lasers, Silicon, Microelectromechanical systems, Transceivers, Optical components, Fiber lasers, Semiconducting wafers, Optical benches, Optical alignment, Optics manufacturing

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