Linbin Luo
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 27 November 2023 Paper
Proceedings Volume 12769, 1276910 (2023) https://doi.org/10.1117/12.2686019
KEYWORDS: Precision measurement, Performance modeling, Diffraction, Design and modelling, Analytical research, Pulse signals, Transmittance, Signal intensity, Opacity, Binary data

Proceedings Article | 27 November 2023 Paper
Xinghui Li, Shengtong Wang, Xiaohao Wang, Linbin Luo, Lvye Gao, Rui Ma
Proceedings Volume 12769, 1276904 (2023) https://doi.org/10.1117/12.2685961
KEYWORDS: Binary data, Genetic algorithms, Design and modelling, Interferometers, Diffraction, Pulse signals, Manufacturing, Precision measurement, Optical gratings

Proceedings Article | 19 December 2022 Presentation + Paper
Proceedings Volume 12318, 123182F (2022) https://doi.org/10.1117/12.2643872
KEYWORDS: Photomasks, Photoresist materials, Mirrors, Lithography, Polarization, Interferometers, Electron beam lithography, Laser applications, Optical lithography, Fabrication

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