Lynne Yuan
at Quanyi Mask Optoelectronics Technology (Jinan) Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper
Yifei Yu, Leo Zeng, Kevin Wang, Xavier Chen, Christian Holl, Claire Lu, Phil Cha, Vic Chang, Robert Tsai, Jerry Wei, Lynne Yuan
Proceedings Volume 12751, 127510S (2023) https://doi.org/10.1117/12.2687005
KEYWORDS: Critical dimension metrology, Calibration, Photomasks, Data modeling, Opacity, Image registration, Cadmium, Design and modelling, Metrology, Optical microscopes

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