Mr. Vic Chang Profile

Vic Chang

at Quanyi Mask Optoelectronics Technology (Jinan) Co Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper

Innovative applications: extending photomask registration tool for critical dimension measurement to achieve high efficiency

Yifei Yu, Leo Zeng, Kevin Wang, Xavier Chen, Christian Holl, Claire Lu, Phil Cha, Vic Chang, Robert Tsai, Jerry Wei, Lynne Yuan

Proceedings Volume 12751, 127510S (2023) https://doi.org/10.1117/12.2687005

KEYWORDS: Critical dimension metrology, Calibration, Photomasks, Data modeling, Opacity, Image registration, Cadmium, Design and modelling, Metrology, Optical microscopes

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years