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Masaya Kamiya
at Shibaura Mechatronics Corp
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Publications (3)
Proceedings Article | 12 November 2024 Presentation + Paper
Rapid freeze-cleaning method
Satoshi Nakamura, Masaya Kamiya, Kensuke Demura, Masashi Yamage, Kei Hattori
Proceedings Volume 13216, 132160T (2024) https://doi.org/10.1117/12.3034592
KEYWORDS: Particles, Supercooling, Temperature distribution, Nozzles, Ice, Megasonic cleaning, Liquids, Image processing, Temperature metrology, Photomasks
Proceedings Article | 16 September 2022 Paper
Freeze point monitoring system for freeze cleaning method
Masaya Kamiya, Kensuke Demura, Minami Nakamura, Kei Hattori
Proceedings Volume 12325, 123250B (2022) https://doi.org/10.1117/12.2640652
KEYWORDS: Supercooling, Photomasks, Particles, Liquids, Temperature metrology, Process control, Stochastic processes, Solids, Cryogenics, Water
SPIE Journal Paper | 6 October 2020 Open Access
Particle and pattern discriminant freeze-cleaning method
Kei Hattori, Daisuke Matsushima, Kensuke Demura, Masaya Kamiya
JM3, Vol. 19, Issue 04, 044401, (October 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.4.044401
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