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Satoshi Nakamura
at Shibaura Mechatronics Corp
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Publications (2)
Proceedings Article | 12 November 2024 Presentation + Paper
Rapid freeze-cleaning method
Satoshi Nakamura, Masaya Kamiya, Kensuke Demura, Masashi Yamage, Kei Hattori
Proceedings Volume 13216, 132160T (2024) https://doi.org/10.1117/12.3034592
KEYWORDS: Particles, Supercooling, Temperature distribution, Nozzles, Ice, Megasonic cleaning, Liquids, Image processing, Temperature metrology, Photomasks
Proceedings Article | 21 October 2014 Paper
The study on EUV mask cleaning without Ru surface damage
Daisuke Matsushima, Kensuke Demura, Satoshi Nakamura, Masafumi Suzuki, Katsuhiro Kishimoto, Makoto Muto
Proceedings Volume 9235, 923518 (2014) https://doi.org/10.1117/12.2070235
KEYWORDS: Extreme ultraviolet, Ruthenium, Reflectivity, Plasma, Mechatronics, Mask cleaning, Natural surfaces, Plasma systems, Transmission electron microscopy, Atomic force microscopy
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