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Masanori Yashiro
at Gigaphoton Inc
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Publications (2)
Proceedings Article | 24 March 2017 Paper
Excimer laser gas usage reduction technology for semiconductor manufacturing
Proceedings Volume 10147, 101471O (2017) https://doi.org/10.1117/12.2257972
KEYWORDS: Gas lasers, Excimer lasers, Neon, Semiconductor manufacturing, Lithography, Beam controllers, Xenon, Deep ultraviolet, Light sources, Molecules, Laser systems engineering, Sustainable technology, Prototyping, Pulsed laser operation, Laser stabilization
Proceedings Article | 13 March 2012 Paper
A reliable higher power ArF laser with advanced functionality for immersion lithography
Akihiko Kurosu, Masaki Nakano, Masanori Yashiro, Masaya Yoshino, Hiroaki Tsushima, Hiroyuki Masuda, Takahito Kumazaki, Shinichi Matsumoto, Kouji Kakizaki, Takashi Matsunaga, Shinji Okazaki, Junichi Fujimoto, Hakaru Mizoguchi
Proceedings Volume 8326, 83261F (2012) https://doi.org/10.1117/12.916324
KEYWORDS: Excimer lasers, Control systems, Optical lithography, Laser drilling, Gas lasers, Laser development, Semiconducting wafers, Gemini Planet Imager, 193nm lithography, Manufacturing
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