Dr. Maxim Lebedev Profile

Dr. Maxim Lebedev

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 4 January 2006 Paper

Optical scanning devices based on PZT thick films formed by aerosol deposition method

Jae-Hyuk Park, Jun Akedo, Maxim Lebedev, Harumichi Sato

Proceedings Volume 6037, 60371S (2006) https://doi.org/10.1117/12.638489

KEYWORDS: Scanners, Mirrors, Ferroelectric materials, Optical scanning, Aerosols, Deposition processes, Metals, Microelectromechanical systems, Silicon, Mirror structures

Read Abstract +

Proceedings Article | 13 November 2002 Paper

Fabrication of microfluidic device (diffuser or mixer) using aerosol deposition method

Jun Akedo, Maxim Lebedev

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.471922

KEYWORDS: Ferroelectric materials, Silicon, Particles, Liquids, Aerosols, Deposition processes, Microfluidics, Electrodes, Diffusers, Glasses

Read Abstract +

Proceedings Article | 13 November 2002 Paper

Thick PZT film/stainless steel actuator fabricated by aerosol deposition method: fatigue property

Maxim Lebedev, Jun Akedo

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.471923

KEYWORDS: Actuators, Ferroelectric materials, Aerosols, Head, Magnetism, Deposition processes, Annealing, Microactuators, Magnetic tracking, Atmospheric particles

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years