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Maximilian Wagner
at Fraunhofer Institut fur Photonische Mikrosysteme
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Publications (1)
Proceedings Article | 12 March 2024 Poster + Paper
MEMS on PIC: a cross-platform approach to combine ultra-low-power MEMS-modulators with photonic integrated circuit
Martin Blasl, Meysam Namdari, Maximilian Wagner, Jan Grahmann
Proceedings Volume 12889, 1288917 (2024) https://doi.org/10.1117/12.3013649
KEYWORDS: Waveguides, Actuators, Microelectromechanical systems, Deformation, Photonic integrated circuits, Phase shifts, Silicon, Etching, Electrodes, Annealing
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