Dr. Jan Grahmann Profile

Dr. Jan Grahmann

at Fraunhofer IPMS

SPIE Involvement:

Author

Publications (26)

Proceedings Article | 12 March 2024 Poster + Paper

MEMS on PIC: a cross-platform approach to combine ultra-low-power MEMS-modulators with photonic integrated circuit

Martin Blasl, Meysam Namdari, Maximilian Wagner, Jan Grahmann

Proceedings Volume 12889, 1288917 (2024) https://doi.org/10.1117/12.3013649

KEYWORDS: Waveguides, Actuators, Microelectromechanical systems, Deformation, Photonic integrated circuits, Phase shifts, Silicon, Etching, Electrodes, Annealing

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Proceedings Article | 12 March 2024 Poster + Paper

Vectorial micro scanning mirror for fast beam positioning of a compact medical therapy laser

Thilo Sandner, Thomas Graßhoff, Markus Schwarzenberg, Klemens Birnbaum, Tino Pügner, Jan Grahmann

Proceedings Volume 12899, 128990R (2024) https://doi.org/10.1117/12.3007365

KEYWORDS: Microelectromechanical systems, Mirrors, Design, Scanners, Laser therapeutics, Coating, Position sensors, Laser scanners, Semiconducting wafers, Piezoresistivity

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Proceedings Article | 15 March 2023 Poster + Paper

2D MEMS vector scanning mirrors for LIDAR, medical imaging, and high laser power applications

Thilo Sandner, Benjamin Mustin, Klemens Birnbaum, Martin Blasl, Thomas Graßhoff, Markus Schwarzenberg, Jan Grahmann

Proceedings Volume 12434, 124340W (2023) https://doi.org/10.1117/12.2668618

KEYWORDS: Electromagnetism, Silicon, Semiconducting wafers

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Proceedings Article | 15 March 2023 Poster + Paper

Wafer-level vacuum packaged translatory MEMS mirror with large stroke for compact NIR-FT spectrometers

Thilo Sandner, Eric Gaumont, Thomas Graßhoff, Andreas Rieck, Tobias Seifert, Gerald Auböck, Jan Grahmann

Proceedings Volume 12434, 124340X (2023) https://doi.org/10.1117/12.2668624

KEYWORDS: Deformable mirrors, Semiconducting wafers, Protactinium, Deformation

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Proceedings Article | 15 March 2023 Poster + Paper

Non-resonant MOEMS mirror for laser cavity-length tuning

André Dreyhaupt, Lucas Oswald, Thomas Graßhoff, Stefan Hugger, Jan Grahmann

Proceedings Volume 12434, 124340V (2023) https://doi.org/10.1117/12.2667010

KEYWORDS: Mirrors, Design and modelling, Microopto electromechanical systems, Quantum cascade lasers, Modulation, Micromirrors, Laser resonators, Wavelength tuning, Wafer bonding, Spectroscopy

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SPIE Journal Paper | 8 January 2022 Open Access

System integration of hybrid assembled large aperture Micro Scanner Array for fast scanning LiDAR sensors

Thilo Sandner, Thomas Graßhoff, Wolf-Dietrich Owe, Andreas Herrmann, Michael Wildenhain, Markus Schwarzenberg, Jan Grahmann

JOM, Vol. 2, Issue 01, 011004, (January 2022) https://doi.org/10.1117/12.10.1117/1.JOM.2.1.011004

KEYWORDS: Microelectromechanical systems, Mirrors, Scanners, LIDAR, System integration, Distance measurement, Receivers, 3D-TOF imaging, Sensors, Laser scanners

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Proceedings Article | 28 February 2020 Presentation + Paper

Vibration analysis of micro mirrors for LIDAR using on-chip piezo-resistive sensor

Jan Grahmann, Richard Schroedter, Oliver Kiethe, Ulrich Todt

Proceedings Volume 11293, 1129308 (2020) https://doi.org/10.1117/12.2551600

KEYWORDS: Mirrors, Scanners, LIDAR, Vibrometry, Micromirrors, Sensors, Microelectromechanical systems, Silicon, Reliability, Crystals

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Proceedings Article | 28 February 2020 Paper

Wide and fast mode-hop free MEMS tunable ECDL concept and realization in the NIR and MIR spectral regime

Morten Hoppe, Hanna Rohling, Sebastian Schmidtmann, Martin Honsberg, Herve Tatenguem, Jan Grahmann, Tobias Milde, Thomas Schanze, Joachim Sacher

Proceedings Volume 11293, 112930C (2020) https://doi.org/10.1117/12.2546213

KEYWORDS: Microelectromechanical systems, Absorption, Semiconductor lasers, Actuators, Carbon monoxide, Mirrors, Gallium antimonide, Near infrared, Gas lasers, Mid-IR

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Proceedings Article | 11 February 2019 Paper

Advances of MOEMS-based external cavity QCLs

M. Haertelt, S. Hugger, L. Butschek, C. Schilling, A. Merten, M. Schwarzenberg, A. Dreyhaupt, J. Grahmann, M. Rattunde, R. Ostendorf

Proceedings Volume 10926, 1092613 (2019) https://doi.org/10.1117/12.2509819

KEYWORDS: Microopto electromechanical systems, Quantum cascade lasers, Infrared spectroscopy, Laser spectroscopy

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Proceedings Article | 29 May 2018 Paper

Towards a compact, portable, handheld device for contactless real-time standoff detection of hazardous substances

Christopher Carson, John Macarthur, Matthew Warden, David Stothard, Lorenz Butschek, Stefan Hugger, Jan-Philip Jarvis, Marko Haertelt, Ralf Ostendorf, Andre Merten, Markus Schwarzenberg, Jan Grahmann, Marcin Ratajczyk

Proceedings Volume 10624, 106240F (2018) https://doi.org/10.1117/12.2305711

KEYWORDS: Sensors, Microopto electromechanical systems, Quantum cascade lasers, Standoff detection, Mid-IR, Explosives

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Proceedings Article | 21 March 2018 Presentation + Paper

Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers

Thilo Sandner, Eric Gaumont, Thomas Grasshoff, Gerald Auböck, Andreas Kenda, Thomas Gisler, Sergiu Langa, Andreas Herrmann, Jan Grahmann

Proceedings Volume 10545, 105450W (2018) https://doi.org/10.1117/12.2290588

KEYWORDS: Mirrors, Semiconducting wafers, Glasses, Protactinium

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Proceedings Article | 20 March 2018 Open Access

Advances in MOEMS technologies for high quality imaging systems

Harald Schenk, Michael Wagner, Jan Grahmann, André Merten

Proceedings Volume 10587, 1058703 (2018) https://doi.org/10.1117/12.2297399

KEYWORDS: Mirrors, Micromirrors, Scanners, Microopto electromechanical systems, Phased array optics, Coating, Analog electronics, Beam steering, Imaging systems, Laser marking

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Proceedings Article | 14 March 2018 Presentation

Recent advances of external cavity QCLs with MOEMS diffraction gratings (Conference Presentation)

Ralf Ostendorf, Stefan Hugger, Lorenz Butschek, Jan-Philip Jarvis, Marko Härtelt, André Dreyhaupt, Jan Grahmann, Marcel Rattunde, Joachim Wagner

Proceedings Volume 10540, 105401K (2018) https://doi.org/10.1117/12.2288214

KEYWORDS: Microopto electromechanical systems, Quantum cascade lasers, Diffraction gratings, Imaging spectroscopy, Spectroscopy, Mid-IR, Laser sources, Chemical analysis, Quantum cryptography, Infrared spectroscopy

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Proceedings Article | 22 February 2018 Presentation + Paper

Repetitive nonlinear control for linear scanning micro mirrors

Richard Schroedter, Markus Schwarzenberg, Jan Grahmann, Thilo Sandner, Klaus Janschek

Proceedings Volume 10545, 1054511 (2018) https://doi.org/10.1117/12.2285558

KEYWORDS: Mirrors, Nonlinear control, Micromirrors, Feedback control, Teeth, Piezoresistive sensors, Control systems, Sensors, Optical coherence tomography, Scalable video coding

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SPIE Journal Paper | 12 September 2017 Open Access

Microoptoelectromechanical systems-based external cavity quantum cascade lasers for real-time spectroscopy

Lorenz Butschek, Stefan Hugger, Jan Jarvis, Marko Haertelt, André Merten, Markus Schwarzenberg, Jan Grahmann, David Stothard, Matthew Warden, Christopher Carson, John Macarthur, Frank Fuchs, Ralf Ostendorf, Joachim Wagner

OE, Vol. 57, Issue 01, 011010, (September 2017) https://doi.org/10.1117/12.10.1117/1.OE.57.1.011010

KEYWORDS: Microopto electromechanical systems, Quantum cascade lasers, Spectroscopy, Scanners, Coating, Laser sources, Silicon, Mid-IR, FT-IR spectroscopy, Sensors

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Proceedings Article | 27 January 2017 Paper

Real-time spectroscopy enabled by external cavity QCLs with MOEMS diffraction gratings

L. Butschek, S. Hugger, J. Jarvis, M. Haertelt, A. Merten, J. Grahmann, D. Boskovic, F. Fuchs, R. Ostendorf, C. Schilling, M. Rattunde, J. Wagner

Proceedings Volume 10111, 101112G (2017) https://doi.org/10.1117/12.2251915

KEYWORDS: Microopto electromechanical systems, Spectroscopy, Quantum cascade lasers, Mid-IR, Scanners, Laser sources, Absorption, Sensors, Pulsed laser operation, FT-IR spectroscopy

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Proceedings Article | 12 May 2016 Paper

Hyperspectral image analysis for standoff trace detection using IR laser spectroscopy

J. Jarvis, F. Fuchs, S. Hugger, R. Ostendorf, L. Butschek, Q. Yang, A. Dreyhaupt, J. Grahmann, J. Wagner

Proceedings Volume 9824, 98240V (2016) https://doi.org/10.1117/12.2223604

KEYWORDS: Hyperspectral imaging, Imaging spectroscopy, Spectroscopy, Backscatter, Target detection, Detection and tracking algorithms, Sensors, Microopto electromechanical systems, Quantum cascade lasers, Data modeling

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Proceedings Article | 15 March 2016 Paper

MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies

Jan Grahmann, André Dreyhaupt, Christian Drabe, Richard Schrödter, Jörg Kamenz, Thilo Sandner

Proceedings Volume 9760, 976006 (2016) https://doi.org/10.1117/12.2212965

KEYWORDS: Sensors, Micromirrors, Signal to noise ratio, Scanners, Wheatstone bridges, Bridges, Sensor technology, Resistance

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Proceedings Article | 13 February 2016 Paper

Real-time spectroscopic sensing using a widely tunable external cavity-QCL with MOEMS diffraction grating

Ralf Ostendorf, Lorenz Butschek, André Merten, Jan Grahmann, Jan Jarvis, Stefan Hugger, Frank Fuchs, Joachim Wagner

Proceedings Volume 9755, 975507 (2016) https://doi.org/10.1117/12.2209064

KEYWORDS: Microopto electromechanical systems, Spectroscopy, Diffraction gratings, Quantum cascade lasers, Imaging spectroscopy, Tunable lasers, Laser spectroscopy, Gas lasers, Carbon monoxide, Absorption, Scanners, Spectral resolution, FT-IR spectroscopy, Light sources

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Proceedings Article | 27 February 2015 Paper

Large MOEMS diffraction grating results providing an EC-QCL wavelength scan of 20%

Jan Grahmann, André Merten, Andreas Herrmann, Ralf Ostendorf, Daniela Bleh, Christian Drabe, Jörg Kamenz

Proceedings Volume 9375, 93750W (2015) https://doi.org/10.1117/12.2079640

KEYWORDS: Mirrors, Microopto electromechanical systems, Quantum cascade lasers, Etching, Signal processing, Diffraction gratings, Coating, Oxides, Silicon, Spectroscopy

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Proceedings Article | 8 February 2015 Paper

Widely tunable quantum cascade lasers for spectroscopic sensing

J. Wagner, R. Ostendorf, J. Grahmann, A. Merten, S. Hugger, Jan Philip Jarvis, F. Fuchs, D. Boskovic, H. Schenk

Proceedings Volume 9370, 937012 (2015) https://doi.org/10.1117/12.2082794

KEYWORDS: Microopto electromechanical systems, Spectroscopy, Imaging spectroscopy, Quantum cascade lasers, Explosives, Backscatter, Chemical analysis, Mirrors, Diffraction gratings, Scanners

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Proceedings Article | 7 March 2014 Paper

Tunable External Cavity Quantum Cascade Lasers (EC-QCL): an application field for MOEMS based scanning gratings

Jan Grahmann, André Merten, Ralf Ostendorf, Michael Fontenot, Daniela Bleh, Harald Schenk, Hans-Joachim Wagner

Proceedings Volume 8977, 897708 (2014) https://doi.org/10.1117/12.2039950

KEYWORDS: Mirrors, Quantum cascade lasers, Microopto electromechanical systems, Silicon, Etching, Chemical analysis, Micromirrors, Collimation, Tolerancing, Spectrometers

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Proceedings Article | 16 February 2012 Paper

Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan head

Jan Grahmann, Michael Wildenhain, Thomas Grasshoff, Christian Gerwig, Hans-Georg Dallmann, Alexander Wolter, Harald Schenk

Proceedings Volume 8252, 825205 (2012) https://doi.org/10.1117/12.910671

KEYWORDS: Mirrors, Head, Distortion, Micromirrors, Scanners, Projection systems, Video processing, Manufacturing, RGB color model, Video

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Proceedings Article | 16 February 2012 Paper

Bi-resonant scanning mirror with piezoresistive position sensor for WVGA laser projection systems

Christian Drabe, David Kallweit, André Dreyhaupt, Jan Grahmann, Harald Schenk, Wyatt Davis

Proceedings Volume 8252, 825209 (2012) https://doi.org/10.1117/12.910203

KEYWORDS: Mirrors, Sensors, Etching, Silicon, Boron, Projection systems, Microelectromechanical systems, Semiconducting wafers, Crystals, Scanning electron microscopy

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