Mr. Michael E. Brown Profile

Michael E. Brown

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Publications (1)

Proceedings Article | 20 October 2006 Paper

Point cleaning of mask blanks for extreme ultraviolet lithography

Mike Brown, John Hartley, Sean Eichenlaub, Abbas Rastegar, Patricia Marmillion, Ken Roessler

Proceedings Volume 6349, 63492K (2006) https://doi.org/10.1117/12.686764

KEYWORDS: Atomic force microscopy, Photomasks, Extreme ultraviolet lithography, Inspection, Image processing, Extreme ultraviolet, Atomic force microscope, Coating, Particles, Image resolution

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