Dr. Miriam Velasco-Ocaña Profile

Dr. Miriam Velasco-Ocaña

at Wooptix SL

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 5 March 2022 Presentation + Paper

New high repeatability wafer geometry measurement technique for full 200mm and 300mm blank wafers

Juan Trujillo-Sevilla, Álvaro Pérez-García, Óscar Casanova-González, Miriam Velasco-Ocaña, Sabato Ceruso, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Javier Martín-Hernández, Alex Roqué-Velasco, José Manuel Rodríguez-Ramos, Jan Gaudestad

Proceedings Volume 12008, 120080A (2022) https://doi.org/10.1117/12.2607315

KEYWORDS: Semiconducting wafers, Photovoltaics, Silicon, Cameras, Data acquisition, Gaussian filters, Wavefronts, Lithography, Imaging systems

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Proceedings Article | 28 October 2021 Presentation + Paper

Stria measurement using wave front phase imaging on a transparent plate

Juan M. Trujillo-Sevilla, Oscar Casanova-González, Miriam Velasco-Ocaña, Sabato Ceruso, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Javier Martín-Hernández, Alex Roqué-Velasco, Alvaro Pérez-García, José Manuel Rodríguez-Ramos, Jan Gaudestad

Proceedings Volume 11889, 118891I (2021) https://doi.org/10.1117/12.2605328

KEYWORDS: Wavefronts, Glasses, Phase imaging, Spatial frequencies, Refractive index, Manufacturing, Visualization, Reflectivity, Optical sensors, Light wave propagation

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Proceedings Article | 12 October 2021 Poster + Presentation + Paper

New metrology technique for measuring wafer geometry on a full 300mm silicon wafer

Juan Trujillo-Sevilla, Óscar Casanova-González, Miriam Velasco-Ocaña, Sabato Ceruso, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Javier Martín-Hernández, Alex Roqué-Velasco, Álvaro Pérez-García, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 11854, 118541B (2021) https://doi.org/10.1117/12.2605516

KEYWORDS: Semiconducting wafers, Silicon, Photovoltaics, Gaussian filters, Data acquisition, Wavefronts, Metrology, Cameras, Overlay metrology, Image sensors

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