Mr. Mohammadamir Ghaderi Profile

Mohammadamir Ghaderi

PhD Candidate at Chalmers University of Technology

SPIE Involvement:

Author

Area of Expertise:

MOEMS , IC Design , Microelectronics , Optical filter

Publications (11)

Proceedings Article | 27 April 2016 Paper

Analysis of the effect of stress-induced waviness in airgap-based optical filters

Mohammadamir Ghaderi, Ehsan Karimi Shahmarvandi, Ger de Graaf, Reinoud Wolffenbuttel

Proceedings Volume 9889, 98890A (2016) https://doi.org/10.1117/12.2227937

KEYWORDS: Optical filters, Finite-difference time-domain method, Finite element methods, Optical filters, Finite-difference time-domain method, Reflectors, Active optics, Refractive index, Microopto electromechanical systems, Microelectromechanical systems, Geometrical optics, Optical components, Surface roughness, Plasma enhanced chemical vapor deposition, Oxides, Silica, Semiconducting wafers, UV optics

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Proceedings Article | 27 April 2016 Paper

Design and fabrication of ripple-free CMOS-compatible stacked membranes for airgap optical filters for UV-visible spectrum

Mohammadamir Ghaderi, Ger de Graaf, Reinoud Wolffenbuttel

Proceedings Volume 9888, 98880R (2016) https://doi.org/10.1117/12.2227769

KEYWORDS: Optical filters, Interference filters, Thin films, Refractive index, Microelectromechanical systems, Fabry–Perot interferometers, Optical components, Optical filter design, Materials processing, Ultraviolet radiation, Dielectrics, Semiconducting wafers, Silica, Plasma enhanced chemical vapor deposition, Optical design, Etching, Microscopes, Scanning electron microscopy

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Proceedings Article | 18 April 2016 Presentation + Paper

CMOS-compatible metamaterial-based wideband mid-infrared absorber for microspectrometer applications

Ehsan Karimi Shahmarvandi, Mohammadamir Ghaderi, N. Pelin Ayerden, Ger de Graaf, Reinoud Wolffenbuttel

Proceedings Volume 9883, 988309 (2016) https://doi.org/10.1117/12.2227800

KEYWORDS: Absorption, Metamaterials, Resonators, Mid-IR, Sensors, Dielectrics, Infrared detectors, Aluminum, Electron beam lithography, Silica, Magnetism, Metals, Gold

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Proceedings Article | 21 May 2015 Paper

Optical design and characterization of a gas filled MEMS Fabry-Perot filter

N. Pelin Ayerden, Mohammadamir Ghaderi, Ger de Graaf, Reinoud Wolffenbuttel

Proceedings Volume 9517, 95171N (2015) https://doi.org/10.1117/12.2178773

KEYWORDS: Optical filters, Mirrors, Fabry–Perot interferometers, Spectroscopy, Electronic filtering, Absorption, Resonators, Reflectivity, Reflectors, Silica

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Proceedings Article | 21 May 2015 Paper

Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed Bragg reflectors

M. Ghaderi, N. P. Ayerden, G. de Graaf, R. Wolffenbuttel

Proceedings Volume 9517, 95171M (2015) https://doi.org/10.1117/12.2178609

KEYWORDS: Reflectivity, Reflectors, Oxides, Etching, Refractive index, Distributed Bragg reflectors, Optical design, Microopto electromechanical systems, Wafer-level optics, Microelectromechanical systems

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Proceedings Article | 8 May 2014 Paper

A blue optical filter for narrow-band imaging in endoscopic capsules

M. Silva, M. Ghaderi, L. Goncalves, G. de Graaf, R. Wolffenbuttel, J. Correia

Proceedings Volume 9129, 912915 (2014) https://doi.org/10.1117/12.2052593

KEYWORDS: Thin films, Optical filters, Silica, Refractive index, Transmittance, Endoscopy, Sputter deposition, Fabry–Perot interferometers, Blue light emitting diodes, Titanium dioxide

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Proceedings Article | 2 May 2014 Paper

Design and fabrication of multiple airgap-based visible filters

M. Ghaderi, R. Wolffenbuttel

Proceedings Volume 9130, 913005 (2014) https://doi.org/10.1117/12.2052554

KEYWORDS: Etching, Oxides, Refractive index, Reflectors, Silicon, Reflectivity, Silica, Microelectromechanical systems, Visible radiation, Oxidation

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The efficiency of a Bragg reflector design for implementation in optical resonators is highly dependent on the ratio between the high-index material and the low-index material used for the quarter-wavelength (QWOT) layers. A higher contrast implies that fewer layers are required to achieve a specified spectral selectivity over a wider spectral band. In turn, the reduced total thickness of the filter stack reduces the effect of optical absorption in the layers. The research presented here focuses on implementation of filters on top of silicon detectors that are already fabricated in a CMOS process. This implies that the constraints of process compatibility, such as the materials to be used, process temperature and cleanroom reentrance related to contamination, need to be considered. Silicon-dioxide is often used in CMOS-compatible designs, which has an index of refraction n~1.5, thus limiting n_Hi/n_Lo to about 2. This value can be improved by 50% when using air-films as the low-n material. Surface micromachining is used for the fabrication of such mirrors. Multiple layers of Si and SiO₂ were alternatingly deposited, and subsequently the Si layers are selectively removed in a sacrificial etch. The width of the λ/4 air-gaps is about 100 nm, which is narrower as compared to the typical layer thickness that is used in surface micromachining for conventional MEMS applications. Moreover, a demanding optical design requires more layers than typically used in a conventional MEMS device. Since the number of stacked layers is significantly higher as compared to the conventional MEMS, fabricating such filters is a challenge. However, unlike a conventional MEMS, electrical contacting to the structural layers is not required in optical filter application, which, eases the fabrication of such filters. This paper presents the design of several 4-layer structures for use in the visible spectral range, along with the fabrication sequence and preliminary measurement results.

Proceedings Article | 2 May 2014 Paper

Design, fabrication and characterization of LVOF-based IR microspectrometers

N. P. Ayerden, M. Ghaderi, M. Silva, A. Emadi, P. Enoksson, J. Correia, G. de Graaf, R. Wolffenbuttel

Proceedings Volume 9130, 91300T (2014) https://doi.org/10.1117/12.2052620

KEYWORDS: Silicon, Optical filters, Silica, Absorption, Sensors, Reflectors, Mirrors, Thin films, Fabry–Perot interferometers, Transmittance

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Proceedings Article | 9 May 2012 Paper

Design and fabrication of microwindmill for fluidic media based on SU-8 for using flow-meter

I. Sabri Alirezaei, M. Ghaderi, M. Khalafi, H. Latifi

Proceedings Volume 8428, 84281H (2012) https://doi.org/10.1117/12.922044

KEYWORDS: Photomasks, Microfluidics, Copper, Glasses, Computer aided design, Photoresist materials, Ultraviolet radiation, Pulsed laser operation, Laser marking, Lithography

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Proceedings Article | 9 May 2012 Paper

Design, fabrication, characterization of a polymeric nano-precision micro z-stage

M. Ghaderi, F. Beygi Azar Aghbolagh, M. Taghavi, I. Sabri, M. Sadegh, H. Latifi

Proceedings Volume 8428, 84281I (2012) https://doi.org/10.1117/12.922049

KEYWORDS: Polymers, Copper, Electrodes, Photomasks, Nanolithography, Optical lithography, Lithography, Photoresist materials, Fabrication, Mirrors

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Proceedings Article | 5 May 2012 Paper

Interferometric-displacement readout of cantilever sensors

M. Ghaderi, I. Sabri, M. Taghavi, F. Beygi Azar Aghbolagh, H. Latifi

Proceedings Volume 8430, 84301J (2012) https://doi.org/10.1117/12.922050

KEYWORDS: Charge-coupled devices, Sensors, Interferometry, Reflection, Reflectivity, Fabrication, Chemical analysis, Biosensing, Actuators, Laser applications

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Showing 5 of 11 publications

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