Mr. Neal R. Fornaciari Profile

Neal R. Fornaciari

Sr. Mbr. Technical Staff at Sandia National Labs California

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Author

Publications (4)

Proceedings Article | 1 July 2002 Paper

Power scale-up of the extreme-ultraviolet electric capillary discharge source

Neal Fornaciari, Howard Bender, Dean Buchenauer, Jason Dimkoff, Michael Kanouff, Steve Karim, Carmelo Romeo, Gregory Shimkaveg, William Silfvast, Kenneth Stewart

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472282

KEYWORDS: Extreme ultraviolet, Capillaries, Curtains, Particles, Lamps, Aluminum nitride, Plasma, Diamond, Electrodes, Sensors

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Proceedings Article | 20 August 2001 Paper

Development of a high-average-power extreme-ultraviolet electric capillary discharge source

Neal Fornaciari, Howard Bender, Dean Buchenauer, Michael Kanouff, Steve Karim, Glenn Kubiak, Christopher Moen, Gregory Shimkaveg, William Silfvast, Kenneth Stewart

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436652

KEYWORDS: Extreme ultraviolet, Lamps, Curtains, Capillaries, Electrodes, Particles, Xenon, Tantalum, Plasma, Extreme ultraviolet lithography

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Proceedings Article | 21 July 2000 Paper

Development of an electric capillary discharge source

Neal Fornaciari, Jim Chang, Daniel Folk, Steven Gianoulakis, John Goldsmith, Glenn Kubiak, Bruce Long, Donna O'Connell, Gregory Shimkaveg, William Silfvast, Kenneth Stewart

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390047

KEYWORDS: Capillaries, Extreme ultraviolet, Electrodes, Plasma, Fiber optic illuminators, Thermal modeling, Extreme ultraviolet lithography, Reflectivity, Semiconducting wafers, Lithography

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Proceedings Article | 25 June 1999 Paper

High-power plasma discharge source at 13.5 nm and 11.4 nm for EUV lithography

William Silfvast, M. Klosner, Gregory Shimkaveg, Howard Bender, Glenn Kubiak, Neal Fornaciari

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351098

KEYWORDS: Capillaries, Xenon, Plasma, Extreme ultraviolet lithography, Extreme ultraviolet, Electrodes, Ions, Lithium, Sensors, Synchrotrons

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