Mr. Paul Sheridan Profile

Paul Sheridan

Applications Engineering Manager at FAZ Technology

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Publications (5)

Proceedings Article | 14 May 2015 Paper

Spectra of plasmas of Ru, Rh, Pd and Mo produced with nanosecond and picosecond laser pulses

Ragava Lokasani, Elaine Long, Paul Sheridan, Patrick Hayden, Fergal O'Reilly, Padraig Dunne, Akira Endo, Jiri Limpouch, Gerry O'Sullivan

Proceedings Volume 9514, 95141B (2015) https://doi.org/10.1117/12.2176551

KEYWORDS: Molybdenum, Plasmas, Palladium, Rhodium, Ruthenium, Ions, Picosecond phenomena, Extreme ultraviolet, X-rays, Lithography

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Proceedings Article | 8 April 2011 Paper

Understanding the behavior of laser-produced tin plasma by time-resolved spectroscopy and simulations of their spectra

I. Kambali, T. McCormack, E. Scally, J. White, F. O'Reilly, P. Sheridan, G. O'Sullivan

Proceedings Volume 7969, 79692P (2011) https://doi.org/10.1117/12.878869

KEYWORDS: Tin, Plasma, Extreme ultraviolet, Ions, Spectrographs, Pulsed laser operation, Satellites, Optical simulations, Aluminum, Plasma spectroscopy

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Proceedings Article | 27 August 2010 Paper

Robust liquid metal collector mirror for EUV and soft x-ray plasma sources

Kenneth Fahy, Fergal O'Reilly, Enda Scally, Paul Sheridan

Proceedings Volume 7802, 78020K (2010) https://doi.org/10.1117/12.860747

KEYWORDS: Extreme ultraviolet, Mirrors, Liquids, Metals, Plasma, Tin, EUV optics, Zemax, X-rays, Coating

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Proceedings Article | 3 June 2005 Paper

EUV laser produced plasma source development for lithography

Patrick Hayden, Paul Sheridan, Gerry O'Sullivan, Padraig Dunne, Lynn Gaynor, Nicola Murphy, Anthony Cummings

Proceedings Volume 5826, (2005) https://doi.org/10.1117/12.604853

KEYWORDS: Tin, Plasma, Extreme ultraviolet, Ceramics, Ions, Xenon, Pulsed laser operation, Extreme ultraviolet lithography, Lithography, Spectrographs

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Proceedings Article | 6 May 2005 Paper

13.5 nm emission from composite targets containing tin

Patrick Hayden, Anthony Cummings, Lynn Gaynor, Nicola Murphy, Gerard O'Sullivan, Paul Sheridan, Emma Sokell, John White, Padraig Dunne

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.601740

KEYWORDS: Tin, Plasmas, Ions, Spectrographs, Extreme ultraviolet, Chemical species, Grazing incidence, Calibration, Electrons, Nd:YAG lasers

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