Dr. Phil Friddle Profile

Dr. Phil Friddle

at Lam Research Corp

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Author

Publications (3)

Proceedings Article | 22 February 2021 Presentation

Quasi-atomic layer etching of Si and nitride hard mask with Cl2 based chemistry

Tao Li, Stefan Schmitz, Phil Friddle, Samantha Tan, Wenbing Yang, Indira Seshadri

Proceedings Volume 11615, 116150E (2021) https://doi.org/10.1117/12.2583647

KEYWORDS: Etching, Silicon, Ions, Chemistry, Control systems, Plasma, Optical lithography, Modulation, Manufacturing, Chlorine

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Proceedings Article | 24 March 2020 Presentation

High-Z metal-based underlayer patterning for improving EUV stochastics (Conference Presentation)

Anuja De Silva, Jennifer Church, Dominik Metzler, Luciana Meli, Nelson Felix, Phil Friddle, Bhaskar Nagabhirava, Siva Kanakasabapathy, Rich Wise

Proceedings Volume 11323, 113230M (2020) https://doi.org/10.1117/12.2551319

KEYWORDS: Optical lithography, Stochastic processes, Extreme ultraviolet, Extreme ultraviolet lithography, Etching, Photoresist materials, Photoresist developing, Lithography, Interfaces, Absorbance

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Proceedings Article | 16 October 2019 Presentation

High-Z metal-based underlayer to improve EUV stochastics (Conference Presentation)

Anuja De Silva, Jennifer Church Church, Dominik Metzler, Luciana Meli, Phil Friddle, Bhaskar Nagabhirava, Rich Wise, Nader Shamma

Proceedings Volume 11147, 111470W (2019) https://doi.org/10.1117/12.2539272

KEYWORDS: Stochastic processes, Extreme ultraviolet, Optical lithography, Extreme ultraviolet lithography, Photoresist materials, Etching, Photoresist developing, Lithography, Interfaces, Absorbance

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