Dr. Ping-ju Chen Profile

Dr. Ping-ju Chen

at Intel Corp

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Publications (1)

Proceedings Article | 27 April 2023 Presentation + Paper

Full wafer OCD metrology: increasing sampling rate without the cost of ownership penalty

Daniel Doutt, Ping-ju Chen, Bhargava Ravoori, Tuyen Tran, Eitan Rothstein, Nir Kampel, Lilach Tamam, Effi Aboody, Avron Ger, Harindra Vedala

Proceedings Volume 12496, 124960B (2023) https://doi.org/10.1117/12.2657471

KEYWORDS: Semiconducting wafers, Etching, Education and training, Chemical mechanical planarization, Metrology, Machine learning, Data modeling, Process control, Time metrology, Visibility

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