Dr. Prashant K. Kulshreshtha
Senior Manager Process Engineering at Applied Materials Inc
SPIE Involvement:
Author
Area of Expertise:
E-beam Lithography , Pattern Design , Resist Characterization , EUV Patterning/Lithogrpahy , Nanoscale Mechanical Property , Silicon device fabrication and characterization
Websites:
Profile Summary

Prashant K Kulshreshtha is Postdoctoral Fellow for Nanoscale property measurement at Molecular Foundry, LBNL. He is currently working with Dr. Deirdre Olynick (Scientist) and Dr. Paul Ashby (Scientist) on a Intel Corp. funded Molecules for Advanced Patterning (MAP) Project to understand and mitigate the pattern collapse in sub-20 nm lithography. He received his Ph.D. in Material Science and Engineering from the North Carolina State University, Raleigh in December 2011. His research interests include developing new scanning probe tools and methods to characterize the mechanical and surface properties of high resolution resist systems.
Publications (4)

Proceedings Article | 30 April 2023 Presentation
Sudha Rathi, Bharati Neelamraju, Rajaram Narayanan, Shuchi Ojha, Abdul Aziz Khaja, Prashant Kulshreshtha, Praket Jha, Harry Whitesell, Karthik Janakiraman, Peiqi Wang, Larry Gao, Nancy Fung, Yung-Chen Lin
Proceedings Volume 12498, 124980P (2023) https://doi.org/10.1117/12.2658562
KEYWORDS: Oxides, Metals, Extreme ultraviolet lithography, Line width roughness, Plasma enhanced chemical vapor deposition, Surface properties, Resistance, Molybdenum, Extreme ultraviolet, Etching

Proceedings Article | 20 March 2015 Paper
Prashant Kulshreshtha, Ken Maruyama, Scott Dhuey, Dominik Ziegler, Weilun Chao, Paul Ashby, Deirdre Olynick
Proceedings Volume 9425, 94250I (2015) https://doi.org/10.1117/12.2086045
KEYWORDS: Electron beam lithography, Scanning electron microscopy, Scanning probe microscopy, Chemistry, Calibration, Line scan image sensors, Electron beams, Atomic force microscopy, Lithography, Line edge roughness

Proceedings Article | 18 April 2013 Paper
Prashant Kulshreshtha, Ken Maruyama, Sara Kiani, Dominik Ziegler, James Blackwell, Deidre Olynick, Paul Ashby
Proceedings Volume 8681, 86810O (2013) https://doi.org/10.1117/12.2011657
KEYWORDS: Atomic force microscopy, Neodymium, Chemistry, Scanning probe microscopy, Ions, Silicon, Scanning electron microscopy, Calibration, Extreme ultraviolet lithography, Transmission electron microscopy

Proceedings Article | 29 March 2013 Paper
Prashant Kulshreshtha, Ken Maruyama, Sara Kiani, Scott Dhuey, Pradeep Perera, James Blackwell, Deirdre Olynick, Paul Ashby
Proceedings Volume 8682, 86820N (2013) https://doi.org/10.1117/12.2011640
KEYWORDS: Line edge roughness, Molecules, Extreme ultraviolet lithography, Scanning electron microscopy, Lithography, Image resolution, Electron beam lithography, Extreme ultraviolet, Chemically amplified resists, Image processing

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