Mr. QiXin Xu Profile

QiXin Xu

at Siemens EDA

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Publications (1)

Proceedings Article | 23 March 2020 Paper

DFM: “Design for Manufacturing” or “Design Friendly Manufacturing” How to convert extra EPE budget into design freedom by SMO

QiXin Xu, Quan Gan, Ao Chen, Gen-Sheng Gao, Wenzhan Zhou, Hung-Wen Chao, Yu Zhang, Chan-Yuan Hu

Proceedings Volume 11328, 113281A (2020) https://doi.org/10.1117/12.2551670

KEYWORDS: Source mask optimization, Design for manufacturing, Manufacturing, Extreme ultraviolet lithography, Design for manufacturability, Optical lithography, Image processing, Neptune, Adaptive optics, Critical dimension metrology

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