Dr. Rogier Verberk
Director Semiconductor Equipment at TNO
SPIE Involvement:
Author
Area of Expertise:
semiconductor equipment , quantum technologies , contamination control , systems engineering , instrumentation , photonics
Websites:
Profile Summary

Dr Rogier Verberk holds a PhD in experimental physics from Leiden University (2005). At TNO he worked on EUV lithography with ASML and Carl Zeiss, and became principal project manager. From 2013 on he helped to set up the QuTech research centre for quantum technologies. Since 2016 he is Market Director at TNO, responsible for Semiconductor Equipment, Quantum Technologies, Industry4.0, and Medical Instrumentation. He is active as core team member of the Dutch national roadmaps for Nanotechnology and Semiconductor Equipment, as well as the Coordination and Support Action of the European Quantum Technologies Flagship.
Publications (2)

Proceedings Article | 1 November 2022 Paper
Rogier Verberk, David Michalak, Richard Versluis, Henk Polinder, Nodar Samkharadze, Sergey Amitonov, Amir Sammak, Larysa Tryputen, Delphine Brousse, Rabah Hanfoug
Proceedings Volume 12472, 1247207 (2022) https://doi.org/10.1117/12.2639994
KEYWORDS: Electrons, Quantum computing, Silicon, Magnetism, Semiconductors, Oxides, Quantum dots, Metals, Quantum wells

Proceedings Article | 28 September 2017 Paper
Proceedings Volume 10446, 1044603 (2017) https://doi.org/10.1117/12.2279672
KEYWORDS: Reticles, Extreme ultraviolet, Inspection, Pellicles, EUV optics, Particles, Optical coherence tomography, Photomasks, Optics manufacturing, Contamination control

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