Mr. Ronald P. Hiltunen Profile

Ronald P. Hiltunen

at Nikon Precision Inc

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Publications (1)

Proceedings Article | 20 March 2019 Paper

Automatic parameter setting for lens aberration control during product lot exposure

Yutaka Kanakutsu, Yukio Koizumi, Hironori Ikezawa, Shigeru Eto, Junji Ikeda, Takenori Takeuchi, Tomoyuki Matsuyama, Edward Stan, Ronald Hiltunen

Proceedings Volume 10961, 109610M (2019) https://doi.org/10.1117/12.2514917

KEYWORDS: Calibration, Reticles, Actuators, Control systems, Wavefronts, Scanners, Distortion, Automatic control, Feedback control, Deformable mirrors

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