Mr. Ronald J. Lesnick Profile

Ronald J. Lesnick

R&D Engineer at Synopsys Inc

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Publications (2)

Proceedings Article | 20 May 2011 Paper

In-die job automation for PROVE

Ronald Lesnick, Stephen Kim, Matthias Waechter, Dirk Seidel, Andreas Mueller, Dirk Beyer

Proceedings Volume 8081, 80810L (2011) https://doi.org/10.1117/12.899779

KEYWORDS: Metrology, Photomasks, Interfaces, Image registration, Image analysis, Human-machine interfaces, Visualization, Double patterning technology, 193nm lithography, Lithography

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Proceedings Article | 20 October 2006 Paper

Automated mask qualification with new CD metrology in CATS environment

Herman Boerland, Ronald Lesnick

Proceedings Volume 6349, 634942 (2006) https://doi.org/10.1117/12.686276

KEYWORDS: Computed tomography, Critical dimension metrology, Metrology, Scanning electron microscopy, Chromium, Quality measurement, Distance measurement, Overlay metrology, Optical proximity correction, Edge roughness

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