Dr. Roy Shtainman Profile

Dr. Roy Shtainman

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Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper

OCD enhanced: implementation and validation of spectral interferometry for nanosheet inner spacer indentation

D. Schmidt, C. Durfee, S. Pancharatnam, M. Medikonda, A. Greene, J. Frougier, A. Cepler, G. Belkin, D. Shafir, R. Koret, R. Shtainman, I. Turovets, S. Wolfling

Proceedings Volume 11611, 116111U (2021) https://doi.org/10.1117/12.2582364

KEYWORDS: Interferometry, Silicon, Metrology, Scatterometry, Reflectometry, Transmission electron microscopy, Semiconductor manufacturing, Reflectivity, Polarization control

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