Sebastian Obwaller
at cosine measurement systems
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 October 2023 Presentation + Paper
Proceedings Volume 12679, 1267903 (2023) https://doi.org/10.1117/12.2678106
KEYWORDS: Mirrors, Silicon, X-ray optics, Semiconducting wafers, Wafer-level optics, X-rays, Synchrotron radiation, Ion beam finishing, Mirror surfaces, Laser cutting

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