Ms. Seungjoo Baek Profile

Seungjoo Baek

at SCREEN SPE Germany GmbH

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Publications (1)

Proceedings Article | 13 November 2024 Presentation

Enhancing sustainability in semiconductor manufacturing: energy-efficient optical crosslinking for lithography processes

Elke Caron, Wesley Zanders, Seungjoo Baek, Seonggil Heo, Jelle Vandereyken, Hyo Seon Suh, Douglas Guerrero, Andreia Santos, Masahiko Harumoto, Tsuyoshi Mitsuhashi

Proceedings Volume PC13215, PC1321507 (2024) https://doi.org/10.1117/12.3036987

KEYWORDS: Lithography, Sustainability, Semiconductor manufacturing, Optics manufacturing, Spin on carbon materials, Semiconductors, Power consumption, Industry, Carbon, System integration

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