Prof. Sheng-Hui Chen Profile

Prof. Sheng-Hui Chen

Assistant Professor at National Central Univ

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Author

Publications (20)

Proceedings Article | 23 August 2017 Paper

Multi-band filter design with less total film thickness for short-wave infrared

Yung-Jhe Yan, I-Pen Chien, Po-Han Chen, Sheng-Hui Chen, Yi-Chun Tsai, Mang Ou-Yang

Proceedings Volume 10375, 1037506 (2017) https://doi.org/10.1117/12.2272560

KEYWORDS: Optical filters, Optical lithography, Interference filters, Bandpass filters

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A multi-band pass filter array was proposed and designed for short wave infrared applications. The central wavelength of the multi-band pass filters are located about 905 nm, 950 nm, 1055 nm and 1550 nm. In the simulation of an optical interference band pass filter, high spectrum performance (high transmittance ratio between the pass band and stop band) relies on (1) the index gap between the selected high/low-index film materials, with a larger gap correlated to higher performance, and (2) sufficient repeated periods of high/low-index thin-film layers. When determining high and low refractive index materials, spectrum performance was improved by increasing repeated periods. Consequently, the total film thickness increases rapidly. In some cases, a thick total film thickness is difficult to process in practice, especially when incorporating photolithography liftoff. Actually the maximal thickness of the photoresist being able to liftoff will bound the total film thickness of the band pass filter. For the application of the short wave infrared with the wavelength range from 900nm to 1700nm, silicone was chosen as a high refractive index material. Different from other dielectric materials used in the visible range, silicone has a higher absorptance in the visible range opposite to higher transmission in the short wave infrared. In other words, designing band pass filters based on silicone as a high refractive index material film could not obtain a better spectrum performance than conventional high index materials like TiO₂ or Ta₂O₅, but also its material cost would reduce about half compared to the total film thickness with the conventional material TiO₂. Through the simulation and several experimental trials, the total film thickness below 4 um was practicable and reasonable. The fabrication of the filters was employed a dual electric gun deposition system with ion assisted deposition after the lithography process. Repeating four times of lithography and deposition process and black matrix coating, the optical device processes were completed.

Proceedings Article | 3 November 2016 Presentation

Investigation of graphene applied on near infrared photodetector (Conference Presentation)

I-Chun Lien, Sheng-Hui Chen

Proceedings Volume 9932, 99320R (2016) https://doi.org/10.1117/12.2237294

KEYWORDS: Graphene, Electrodes, Photodetectors, Chemical vapor deposition, Near infrared, Germanium, Optical communications, Absorption, Metals, Carbon

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Proceedings Article | 2 November 2016 Presentation

Sub-wavelength grating structure on the planar waveguide (Conference Presentation)

Zhu Qing-Song, Chen Sheng-Hui

Proceedings Volume 9929, 99290U (2016) https://doi.org/10.1117/12.2238509

KEYWORDS: Planar waveguides, Waveguides, Reflectors, Lithography, Finite-difference time-domain method, Cladding, Silica, Silicon, Distributed Bragg reflectors, Photoresist materials

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Proceedings Article | 7 March 2014 Paper

THz acoustic spectroscopy based on GaN nanostructures

Kung-Hsuan Lin, Dzung-Han Tsai, Kuan-Jen Wang, Sheng-Hui Chen, Kai-Lun Chi, Jin-Wei Shi, Po-Cheng Chen, Jinn-Kong Sheu

Proceedings Volume 8984, 89840C (2014) https://doi.org/10.1117/12.2036171

KEYWORDS: Acoustics, Silica, Terahertz radiation, Gallium nitride, Spectroscopy, Signal attenuation, Vitreous, Femtosecond phenomena, Picosecond phenomena, Quantum wells

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SPIE Journal Paper | 11 March 2013

Replica of the structural color for Papilio blumei butterfly

Mei-Ling Lo, Wen-Hsin Li, Shao-Ze Tseng, Sheng-Hui Chen, Chia-Hua Chan, Cheng-Chung Lee

JNP, Vol. 7, Issue 01, 073597, (March 2013) https://doi.org/10.1117/12.10.1117/1.JNP.7.073597

KEYWORDS: Optical spheres, Multilayers, Silicon, Atomic layer deposition, Etching, Scanning electron microscopy, Tantalum, Photonic crystals, Plasma etching, Refractive index

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Proceedings Article | 17 October 2012 Paper

Optical and luminescent properties of CdSe/ZnS and TiO[sub]2[/sub] semiconductor quantum dots embedded into PMMA layers

Hung-Ju Lin, Yu-Jen Chen, Judikael Le-Rouzo, Alexandre Merlen, Waldir Avansi, Sheng-Hui Chen, François Flory, Cheng-Chung Lee, Valmor Mastelaro

Proceedings Volume 8465, 846510 (2012) https://doi.org/10.1117/12.929268

KEYWORDS: Quantum dots, Polymethylmethacrylate, Absorption, Electrons, Semiconductors, Transmission electron microscopy, Luminescence, Thin films, Silica, Titanium dioxide

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Proceedings Article | 4 October 2011 Paper

Investigation of the optical property and structure of WO3 thin films with different sputtering depositions

Hsi-Chao Chen, Der-Jun Jan, Chien-Han Chen, Kuo-Ting Huang, Yen-Ming Lo, Sheng-Hui Chen

Proceedings Volume 8168, 81681Z (2011) https://doi.org/10.1117/12.897017

KEYWORDS: Thin films, Sputter deposition, Oxygen, Oxides, Raman spectroscopy, Tungsten, Thin film deposition, Transmittance, Optical properties, Argon

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Proceedings Article | 4 October 2011 Paper

Residual stress analysis for oxide thin film deposition on flexible substrate using finite element method

Hsi-Chao Chen, Chen-Yu Huang, Ssu-Fan Lin, Sheng-Hui Chen

Proceedings Volume 8168, 816820 (2011) https://doi.org/10.1117/12.897021

KEYWORDS: Finite element methods, Thin films, Oxides, Thin film deposition, Stress analysis, Silica, Positron emission tomography, Sputter deposition, 3D modeling, Photonic crystal devices

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Proceedings Article | 8 September 2010 Paper

Research of ZnS as a buffer layer for CIGS solar cells

Hsin-Wei Huang, Sheng-Hui Chen, Cheng-Chung Lee

Proceedings Volume 7771, 77710Q (2010) https://doi.org/10.1117/12.860410

KEYWORDS: Zinc, Copper indium gallium selenide, Solar cells, Sputter deposition, Molybdenum, Thin films, Cadmium sulfide, Argon, Transmittance, Selenium

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Proceedings Article | 17 February 2010 Paper

Antireflection on plastic substrates using ion etching with discontinuous metallic film

Yu-Wen Yeh, Sheng-Hui Chen, Cheng-Chung Lee, Shih-Liang Ku, Chao-Chun Huang

Proceedings Volume 7591, 759112 (2010) https://doi.org/10.1117/12.842913

KEYWORDS: Reflectivity, Positron emission tomography, Ions, Etching, Transmittance, Platinum, Antireflective coatings, Surface roughness, Coating, Ion beams

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Proceedings Article | 21 August 2009 Paper

Optical and electric properties of aluminum-gallium doped zinc oxide for transparent conducting film

Meng-Chi Li, Chien-Cheng Kuo, Sheng-Hui Chen, Cheng-Chung Lee

Proceedings Volume 7409, 74090W (2009) https://doi.org/10.1117/12.825206

KEYWORDS: Transmittance, Thin films, Zinc oxide, Aluminum, Gallium, Resistance, Sputter deposition, Transparent conducting films, Reflection, Solar cells

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Proceedings Article | 21 August 2009 Paper

Refractive index and thickness of coating measurement interferometer

Chao-Yuan Wu, Kai Wu, Sheng-Hui Chen, Cheng-Chung Lee

Proceedings Volume 7409, 74090S (2009) https://doi.org/10.1117/12.825815

KEYWORDS: Thin films, Refractive index, Interferometers, Reflection, Phase shifts, Cameras, Polarizers, Coating, Light sources, Bandpass filters

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SPIE Journal Paper | 1 July 2009

Fabrication of three-dimensional photonic crystals using autocloning layers on the self-assembled microspheres

Te-Hung Chang, Sheng-Hui Chen, Chia-Hua Chan, Yu-Wen Yeh, Shih-Liang Ku, Cheng-Chung Lee, Chii-Chang Chen, Chao-Chun Huang

OE, Vol. 48, Issue 07, 073401, (July 2009) https://doi.org/10.1117/12.10.1117/1.3183906

KEYWORDS: Etching, Thin films, Photonic crystals, Multilayers, Ions, Thin film deposition, Molecular self-assembly, Tantalum, Process modeling, Particles

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Proceedings Article | 19 February 2009 Paper

Two-dimensional photonic crystal polarization filter with dual-band and wide working wavelength range

Kwang-Yao Chai, Te-Hung Chang, Yu-Wen Yeh, Sheng-Hui Chen, Cheng-Chung Lee

Proceedings Volume 7205, 720505 (2009) https://doi.org/10.1117/12.809037

KEYWORDS: Dielectric polarization, Refractive index, Finite-difference time-domain method, Photon polarization, Photonics, Photonic crystals, Visible radiation, Multilayers, Near infrared, Titanium dioxide

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Proceedings Article | 25 September 2008 Paper

Measurement of thermal expansion coefficient and biaxial modulus of DWDM filters using phase-shift interferometer

Chien-Cheng Kuo, Sheng-Hui Chen, Cheng-Chung Lee

Proceedings Volume 7101, 71010T (2008) https://doi.org/10.1117/12.798743

KEYWORDS: Dense wavelength division multiplexing, Temperature metrology, Optical filters, Thin films, Refractive index, Interferometers, Phase interferometry, Thermography, Protactinium, Analytical research

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Proceedings Article | 21 September 2007 Paper

Fabrication of hydrogenated microcrystalline silicon thin films using RF magnetron sputtering

Hsuan-Wen Wang, Wei-Ning Su, Chia-Wei Han, Sheng-Hui Chen, Cheng-Chung Lee

Proceedings Volume 6674, 66740B (2007) https://doi.org/10.1117/12.733513

KEYWORDS: Thin films, Hydrogen, Crystals, Sputter deposition, Silicon films, Microcrystalline materials, Plasma enhanced chemical vapor deposition, Amorphous silicon, Silicon, Thin film solar cells

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Proceedings Article | 21 September 2007 Paper

Analyses of structural films using effective refractive index model

Te-Hung Chang, Yu-Wen Yeh, Sheng-Hui Chen, Cheng-Chung Lee

Proceedings Volume 6674, 667405 (2007) https://doi.org/10.1117/12.733595

KEYWORDS: Refractive index, Multilayers, Reflectivity, Polarization, Transmittance, Thin films, Photonic crystals, Shape analysis, Silicon, Solids

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Proceedings Article | 31 August 2006 Paper

Fabrication of autocloned photonic crystals by using electron-beam gun with ion-assisted deposition

Te-Hung Chang, Sheng-Hui Chen, Chien-Cheng Kuo, Cheng-Chung Lee

Proceedings Volume 6327, 632708 (2006) https://doi.org/10.1117/12.678736

KEYWORDS: Ion beams, Etching, Ions, Photonic crystals, Multilayers, Thin film deposition, Thin films, Deposition processes, Sputter deposition, Lithography

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Proceedings Article | 28 August 2006 Paper

Fabrication of dense wavelength division multiplexing filters with large useful area

Cheng-Chung Lee, Sheng-Hui Chen, Jin-Cherng Hsu, Chien-Cheng Kuo

Proceedings Volume 6286, 62860E (2006) https://doi.org/10.1117/12.678915

KEYWORDS: Dense wavelength division multiplexing, Ions, Coating, Etching, Ion beams, Optical filters, Tantalum, Bandpass filters, Tolerancing, Reflectors

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Proceedings Article | 28 August 2006 Paper

A new design of thin-film grating optical low-pass filter and its fabrication

Cheng-Chung Lee, Sheng-Hui Chen

Proceedings Volume 6286, 628609 (2006) https://doi.org/10.1117/12.678717

KEYWORDS: Modulation transfer functions, Thin films, Spatial frequencies, Digital imaging, Charge-coupled devices, Diffraction gratings, Distortion, Solids, Metals, Digital cameras

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Showing 5 of 20 publications

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