Dr. Shuo Liu Profile

Dr. Shuo Liu

at Huazhong Univ of Science and Technology

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Publications (2)

Proceedings Article | 24 November 2023 Paper

Optimizing measurement configuration for x-ray critical dimension metrology based on condition number

Tianjuan Yang, Xiuguo Chen, Jiahao Zhang, Shuo Liu, Shiyuan Liu

Proceedings Volume 12935, 1293557 (2023) https://doi.org/10.1117/12.3008281

KEYWORDS: Condition numbers, Matrices, Measurement uncertainty, X-rays, Metrology, Critical dimension metrology, Inverse problems, Error analysis, Scattering

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Proceedings Article | 19 November 2021 Paper

X-ray scatterometry using deep learning

Shuo Liu, Tianjuan Yang, Jiahao Zhang, Jianyuan Ma, Shiyuan Liu, Xiuguo Chen

Proceedings Volume 12059, 120591M (2021) https://doi.org/10.1117/12.2612769

KEYWORDS: Data modeling, Statistical modeling, Scattering, Diffraction, X-rays, Scatterometry, Convolution, Inverse problems, Metrology, Optics manufacturing

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