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Soojung Leem
Senior Chemist at Dupont
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Publications (2)
Proceedings Article | 1 May 2023 Presentation + Paper
Modification of organic underlayers by plasma during dry etching and its effect on the film properties
Soojung Clara Leem, Jae Hwan Sim, Youngeun Bae
Proceedings Volume 12498, 124980C (2023) https://doi.org/10.1117/12.2658118
KEYWORDS: Dry etching, Etching, Wet etching, Metals, Plasma, Oxygen, Shrinkage, Chemical analysis, Plasma etching
Proceedings Article | 25 May 2022 Presentation + Paper
Thickness dependence of properties of EUV underlayer thin films
Jae Hwan Sim, Yoo-Jin Ghang, Jung-June Lee, Jae Yun Ahn, Jae-Bong Lim, Joo Sung Lee, Min Young Jeong, Soojung Leem, Youngeun Bae, Yinjie Cen, James Marsh, Lei Zhang
Proceedings Volume 12055, 120550B (2022) https://doi.org/10.1117/12.2613437
KEYWORDS: Thin films, Extreme ultraviolet, Polymers, Extreme ultraviolet lithography, Semiconducting wafers, Polymer thin films, Chemical analysis, Silicon
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