Dr. Soonyang Kwon Profile

Dr. Soonyang Kwon

at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 8 March 2021 Presentation + Paper

Microsphere-assisted ultra-small spot spectral reflectometry technique for semiconductor device metrology

Soonyang Kwon, Kwangrak Kim, Jangryul Park, Yunje Cho, Myungjun Lee

Proceedings Volume 11611, 116110G (2021) https://doi.org/10.1117/12.2582269

KEYWORDS: Reflectometry, Super resolution, Reflectance spectroscopy, Semiconductors, Metrology, Photonic nanostructures, Spectroscopes, Signal to noise ratio, Semiconducting wafers, Image resolution

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