Mr. Yunje Cho Profile

Yunje Cho

at SAMSUNG Electronics Co., Ltd.

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Publications (2)

Proceedings Article | 13 June 2022 Presentation

Automatic beam optimization technique based on beam profile deconvolution for scanning electron microscopy

Yunje Cho, Subong Shon, Yeny Yim, Changhoon Choi, Myungjun Lee

Proceedings Volume PC12053, PC120530B (2022) https://doi.org/10.1117/12.2612446

KEYWORDS: Scanning electron microscopy, Deconvolution, Monochromatic aberrations, Image processing, Resolution enhancement technologies, Mathematics, Image resolution, Image quality, Image enhancement, Distortion

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Proceedings Article | 8 March 2021 Presentation + Paper

Microsphere-assisted ultra-small spot spectral reflectometry technique for semiconductor device metrology

Soonyang Kwon, Kwangrak Kim, Jangryul Park, Yunje Cho, Myungjun Lee

Proceedings Volume 11611, 116110G (2021) https://doi.org/10.1117/12.2582269

KEYWORDS: Reflectometry, Super resolution, Reflectance spectroscopy, Semiconductors, Metrology, Photonic nanostructures, Spectroscopes, Signal to noise ratio, Semiconducting wafers, Image resolution

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