Dr. Stephen D. Senturia Profile

Dr. Stephen D. Senturia

Chairman & CTO at Polychromix Inc

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Author

Publications (5)

SPIE Journal Paper | 1 October 2005

Programmable diffraction gratings and their uses in displays, spectroscopy, and communications

Stephen Senturia, David Day, Mike Butler, Malcolm Smith

JM3, Vol. 4, Issue 04, 041401, (October 2005) https://doi.org/10.1117/12.10.1117/1.2107687

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Proceedings Article | 24 January 2004 Open Access

Programmable diffraction gratings and their uses in displays, spectroscopy, and communications

Stephen Senturia

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.523978

KEYWORDS: Microelectromechanical systems, Mirrors, Diffraction gratings, Telecommunications, Spectroscopy, Spectroscopes, Grating light valves, Chemical elements, Control systems, Actuators

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Proceedings Article | 24 January 2004 Paper

A MEMS-based correlation radiometer

Michael Sinclair, Kent Pfeifer, Michael Butler, Stephen Senturia, Erik Deutsch, Dan Youngner, Eugen Cabuz, G. Hocker

Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.536306

KEYWORDS: Radiometry, Modulation, Sensors, Diffraction gratings, Mirrors, Radio optics, Electrodes, Prototyping, Infrared radiation, Signal detection

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Proceedings Article | 13 September 1996 Paper

Material property measurements of micromechanical polysilicon beams

Raj Gupta, Peter Osterberg, Stephen Senturia

Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250952

KEYWORDS: Data modeling, Modeling, Microelectromechanical systems, Oxides, Fabrication, Metrology, Optical simulations, Silicon, Solids, Diamond

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Proceedings Article | 2 March 1993 Paper

Design and analysis of an ARROW-waveguide-based silicon pressure transducer

Albert Young, Chenglin Xu, Wei-Ping Huang, Stephen Senturia

Proceedings Volume 1793, (1993) https://doi.org/10.1117/12.141228

KEYWORDS: Waveguides, Silicon, Integrated optics, Transducers, Sensors, Attenuators, Silica, Semiconducting wafers, Microfabrication, Beam propagation method

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