CONFERENCE PROCEEDINGS
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Tae Hoon Park
at Korea Univ
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Author
Publications (3)
Proceedings Article | 14 March 2018 Presentation
Highly-efficient top-emitting UV A-to-C LEDs using AlN-based glass electrodes (Conference Presentation)
Proceedings Volume 10532, 1053222 (2018) https://doi.org/10.1117/12.2285988
KEYWORDS: Electrodes, Light emitting diodes, Glasses, Deep ultraviolet, Electrical breakdown, Ultraviolet radiation, Transmittance, Resistance, Aluminum nitride, Packaging
Proceedings Article | 22 March 2010 Paper
Comparison of OPC models with and without 3D-mask effect
Jung-Hoon Ser, Tae-Hoon Park, Moon-Gyu Jeong, Eun-Mi Lee, Sung-Woo Lee, Chun-Suk Suh, Seong-Woon Choi, Chan-Hoon Park, Joo-Tae Moon
Proceedings Volume 7640, 76401T (2010) https://doi.org/10.1117/12.848317
KEYWORDS: 3D modeling, Optical proximity correction, Photomasks, Cadmium, Semiconducting wafers, Scanning electron microscopy, Semiconductors, Electronics, Scanners, Lithography
Proceedings Article | 12 May 2005 Paper
Illumination and multi-step OPC optimization to enhance process margin of the 65nm node device exposed by dipole illumination
Soo-Han Choi, Tae-Hoon Park, Eunsung Kim, Hyoung-Joo Youn, Dae-Youp Lee, Yong-Chan Ban, A-Young Je, Dong-Hyun Kim, Ji-Suk Hong, Yoo-Hyon Kim, Moon-Hyun Yoo, Jeong-Taek Kong
Proceedings Volume 5754, (2005) https://doi.org/10.1117/12.600249
KEYWORDS: Nanoimprint lithography, Photomasks, Optical proximity correction, Semiconducting wafers, Lithographic illumination, Lithography, Thin films, Scanners, Model-based design, SRAF
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