Ms. Taeko Kashiwa Profile

Taeko Kashiwa

at Hitachi High-Tech Corp

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Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper

Massive metrology and inspection solution for EUV by area inspection SEM with machine learning technology

Tsuyoshi Kondo, Naoma Ban, Yasushi Ebizuka, Yasutaka Toyoda, Yukari Yamada, Taeko Kashiwa, Hirohito Koike, Hiroyuki Shindo, Anne-Laure Charley, Mohamed Saib, Frieda Van Roey, Peter De Bisschop, Danilo De Simone, Christophe Beral, Gian Lorusso

Proceedings Volume 11611, 1161111 (2021) https://doi.org/10.1117/12.2583691

KEYWORDS: Inspection, Scanning electron microscopy, Metrology, Extreme ultraviolet, Machine learning, Logic, Stochastic processes, Process control, Critical dimension metrology, Time metrology

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