Dr. Terence Garvey Profile

Dr. Terence Garvey

at Paul Scherrer Institut

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Publications (1)

Proceedings Article | 8 October 2018 Presentation + Paper

A high-brightness accelerator-based EUV source for metrology applications

Yasin Ekinci, Terence Garvey, Andreas Streun, Albin Wrulich, Leonid Rivkin

Proceedings Volume 10810, 108100W (2018) https://doi.org/10.1117/12.2501930

KEYWORDS: Defect inspection, Extreme ultraviolet, Metrology, Inspection, Photomasks, Reliability, Optical design, Synchrotrons, Extreme ultraviolet lithography

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