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Timothée Choisnet
PhD Student at CEA-Leti
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Publications (3)
Proceedings Article | 10 April 2024 Poster + Paper
Small angle x-ray scattering overlay metrology for advanced nodes
Proceedings Volume 12955, 1295535 (2024) https://doi.org/10.1117/12.3010744
KEYWORDS: Overlay metrology, Scanning electron microscopy, Contour extraction, Scanning transmission electron microscopy, Semiconducting wafers, Scattering, X-rays, Silicon, Image restoration, Critical dimension metrology
SPIE Journal Paper | 8 March 2024
Cross-evaluation of critical dimension measurement techniques
Timothée Choisnet, Abdelali Hammouti, Vincent Gagneur, Jérôme Reche, Guido Rademaker, Guillaume Freychet, Guillaume Jullien, Julien Ducoté, Patrice Gergaud, Delphine Le Cunff
JM3, Vol. 23, Issue 01, 014002, (March 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.014002
KEYWORDS: Critical dimension metrology, Transmission electron microscopy, Cadmium, X-rays, Synchrotrons, Silicon, Semiconducting wafers, Lithography, Scanning electron microscopy, Chromium
Proceedings Article | 27 April 2023 Presentation + Paper
Critical dimension measurement: from synchrotron small angle x-ray scattering to industrial optical scatterometry techniques
Timothée Choisnet, Abdelali Hammouti, Vincent Gagneur, Jérôme Reche, Guido Rademaker, Guillaume Freychet, Guillaume Jullien, Julien Ducote, Patrice Gergaud, Delphine Le Cunff
Proceedings Volume 12496, 124961K (2023) https://doi.org/10.1117/12.2657661
KEYWORDS: Transmission electron microscopy, Synchrotrons, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers, Cadmium, X-rays, Scattering, Lithography, Silicon
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