Mr. Vincent Gagneur Profile

Vincent Gagneur

at STMicroelectronics SA

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Publications (2)

SPIE Journal Paper | 8 March 2024

Cross-evaluation of critical dimension measurement techniques

Timothée Choisnet, Abdelali Hammouti, Vincent Gagneur, Jérôme Reche, Guido Rademaker, Guillaume Freychet, Guillaume Jullien, Julien Ducoté, Patrice Gergaud, Delphine Le Cunff

JM3, Vol. 23, Issue 01, 014002, (March 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.014002

KEYWORDS: Critical dimension metrology, Transmission electron microscopy, Cadmium, X-rays, Synchrotrons, Silicon, Semiconducting wafers, Lithography, Scanning electron microscopy, Chromium

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Proceedings Article | 27 April 2023 Presentation + Paper

Critical dimension measurement: from synchrotron small angle x-ray scattering to industrial optical scatterometry techniques

Timothée Choisnet, Abdelali Hammouti, Vincent Gagneur, Jérôme Reche, Guido Rademaker, Guillaume Freychet, Guillaume Jullien, Julien Ducote, Patrice Gergaud, Delphine Le Cunff

Proceedings Volume 12496, 124961K (2023) https://doi.org/10.1117/12.2657661

KEYWORDS: Transmission electron microscopy, Synchrotrons, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers, Cadmium, X-rays, Scattering, Lithography, Silicon

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